***SHUT DOWN COMPLETE*** 13:59 2858.51 SEC ***IN STANDBY STATE*** 13:59 0.68 SEC VALID USER ID ENTERED 14:00 15-Jan-99 RECIPE # 6011 15-Jan-99 14:00 COOL TIME 10.0 SEC. TFM SEQUENCE 1 OUTPUT CODE 528 + DEVIATION 8 PERCENT - DEVIATION 8 PERCENT TFM STANDARD 0 m ohm/sq. STATION 1 STATION 2 HEAT/COOL (H/C) NO HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 YES DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 0.0 PRE- H/C TIME 40.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 30.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 75% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 5.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 45.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 30.0 STATION 3 STATION 4 HEAT/COOL (H/C) YES HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 85.0 PRE- H/C TIME 85.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0 ***SHUT DOWN COMPLETE*** 14:45 2673.25 SEC ***IN STANDBY STATE*** 14:45 0.42 SEC VALID USER ID ENTERED 16:22 15-Jan-99  RECIPE # 10011 15-Jan-99 16:22 COOL TIME 85.0 SEC. TFM SEQUENCE 1 OUTPUT CODE 528 + DEVIATION 0 PERCENT - DEVIATION 0 PERCENT TFM STANDARD 0 m ohm/sq. STATION 1 STATION 2 RF ETCH YES HEAT/COOL (H/C) YES SETTLING TIME 60.0 DEPOSIT 1 YES ETCH TIME 60.0 DEPOSIT 2 NO SELF BIAS VOLTAGE 60% PRE- H/C TIME 40.0 ON RAMP TIME 25.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 50.0 DEPOSIT 1 POWER 75% DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% ON RAMP TIME 5.0 SHUTTER DELAY TIME 45.0 SHUTTER OPEN TIME 50.0 STATION 3 STATION 4 HEAT/COOL (H/C) YES HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 85.0 PRE- H/C TIME 85.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0 ***SHUT DOWN COMPLETE*** 20:02 13098.44 SEC ***IN STANDBY STATE*** 20:02 0.61 SEC VALID USER ID ENTERED 06:28 16-Jan-99  RECIPE # 6011 16-Jan-99 06:29 COOL TIME 10.0 SEC. TFM SEQUENCE 1 OUTPUT CODE 528 + DEVIATION 8 PERCENT - DEVIATION 8 PERCENT TFM STANDARD 0 m ohm/sq. STATION 1 STATION 2 HEAT/COOL (H/C) NO HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 YES DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 0.0 PRE- H/C TIME 40.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 30.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 75% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 5.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 45.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 30.0 STATION 3 STATION 4 HEAT/COOL (H/C) YES HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 85.0 PRE- H/C TIME 85.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0 ***SHUT DOWN COMPLETE*** 07:34 3845.25 SEC ***IN STANDBY STATE*** 07:34 0.42 SEC VALID USER ID ENTERED 07:34 16-Jan-99 RECIPE # 6011 16-Jan-99 07:35 COOL TIME 10.0 SEC. TFM SEQUENCE 1 OUTPUT CODE 528 + DEVIATION 8 PERCENT - DEVIATION 8 PERCENT TFM STANDARD 0 m ohm/sq. STATION 1 STATION 2 HEAT/COOL (H/C) NO HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 YES DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 0.0 PRE- H/C TIME 40.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 30.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 75% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 5.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 45.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 30.0 STATION 3 STATION 4 HEAT/COOL (H/C) YES HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 85.0 PRE- H/C TIME 85.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0 ***SHUT DOWN COMPLETE*** 08:28 3150.65 SEC ***IN STANDBY STATE*** 08:28 0.82 SEC VALID USER ID ENTERED 08:28 16-Jan-99 RECIPE # 6011 16-Jan-99 08:28 COOL TIME 10.0 SEC. TFM SEQUENCE 1 OUTPUT CODE 528 + DEVIATION 8 PERCENT - DEVIATION 8 PERCENT TFM STANDARD 0 m ohm/sq. STATION 1 STATION 2 HEAT/COOL (H/C) NO HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 YES DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 0.0 PRE- H/C TIME 40.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 30.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 75% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 5.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 45.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 30.0 STATION 3 STATION 4 HEAT/COOL (H/C) YES HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 85.0 PRE- H/C TIME 85.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0 ***SHUT DOWN COMPLETE*** 10:41 7897.03 SEC ***IN STANDBY STATE*** 10:41 0.20 SEC **************************************** ERROR 11:05 HI VAC INTERLOCK LOST ( 77 2 830 9 11:05) **************************************** VALID USER ID ENTERED 23:41 16-Jan-99  RECIPE # 8011 16-Jan-99 23:42 COOL TIME 85.0 SEC. TFM SEQUENCE 1 OUTPUT CODE 528 + DEVIATION 15 PERCENT - DEVIATION 15 PERCENT TFM STANDARD 40 m ohm/sq. STATION 1 STATION 2 HEAT/COOL (H/C) NO HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 YES DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 0.0 PRE- H/C TIME 40.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 40.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 75% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 5.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 45.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 40.0 STATION 3 STATION 4 HEAT/COOL (H/C) YES HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 40.0 PRE- H/C TIME 45.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0 ***SHUT DOWN COMPLETE*** 01:42 7154.76 SEC ***IN STANDBY STATE*** 01:42 0.93 SEC VALID USER ID ENTERED 09:21 19-Jan-99  RECIPE # 3180 19-Jan-99 09:22 COOL TIME 10.0 SEC. TFM SEQUENCE 33 OUTPUT CODE 528 + DEVIATION 100 PERCENT - DEVIATION 100 PERCENT TFM STANDARD 8 m ohm/sq. STATION 1 STATION 2 HEAT/COOL (H/C) NO HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 0.0 PRE- H/C TIME 10.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0 STATION 3 STATION 4 HEAT/COOL (H/C) YES HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 10.0 PRE- H/C TIME 10.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0  #======= Disconnected 13:35 1999-01-20 Duration 00:21:51 Transfers 0 =========# HALTED 14:22 17900.65 SEC VALID USER ID ENTERED 14:22 22-Jan-99 **************************************** ERROR 14:22 ILLEGAL MESSAGE IN CURRENT MODE ( 225 1 843 9 14:22) ****************************************  RECIPE # 10011 27-Jan-99 02:57 COOL TIME 85.0 SEC. TFM SEQUENCE 1 OUTPUT CODE 528 + DEVIATION 0 PERCENT - DEVIATION 0 PERCENT TFM STANDARD 0 m ohm/sq. STATION 1 STATION 2 RF ETCH YES HEAT/COOL (H/C) YES SETTLING TIME 60.0 DEPOSIT 1 YES ETCH TIME 60.0 DEPOSIT 2 NO SELF BIAS VOLTAGE 60% PRE- H/C TIME 40.0 ON RAMP TIME 25.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 50.0 DEPOSIT 1 POWER 75% DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% ON RAMP TIME 5.0 SHUTTER DELAY TIME 45.0 SHUTTER OPEN TIME 50.0 STATION 3 STATION 4 HEAT/COOL (H/C) YES HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 85.0 PRE- H/C TIME 85.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0 ***************************************** OUT OF REGULATION ERROR 03:08 611.28 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 1 53.00SECONDS ***************************************** ***ALARM ON*** 03:08 0.94 SEC ***ALARM OFF*** 03:11 188.60 SEC ***************************************** OUT OF REGULATION ERROR 03:16 302.41 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 1 53.00SECONDS ***************************************** OUT OF REGULATION ERROR 03:18 138.91 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 1 45.77SECONDS ***************************************** ***ALARM ON*** 03:18 1.57 SEC ***ALARM OFF*** 03:18 7.41 SEC ***************************************** OUT OF REGULATION ERROR 03:21 142.92 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 1 45.77SECONDS ***************************************** OUT OF REGULATION ERROR 03:23 132.18 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 1 38.75SECONDS ***************************************** ***ALARM ON*** 03:23 0.85 SEC ***ALARM OFF*** 03:23 3.27 SEC ***************************************** OUT OF REGULATION ERROR 03:29 348.26 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 2 52.69SECONDS ***************************************** ***ALARM ON*** 03:29 0.92 SEC ***ALARM OFF*** 03:29 4.38 SEC  ***ALARM ON*** 03:32 197.21 SEC **************************************** ERROR 03:32 IGNITE RF FAILURE ( 92 2 335 2 03:32) ( 0/ 0, 1/ 3, 1/ 2, 1/ 1, 0/ 0) (RECIPE #10011) **************************************** ***************************************** OUT OF REGULATION ERROR 03:38 338.57 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 3 54.37SECONDS ***************************************** ***ALARM ON*** 03:38 1.23 SEC ***ALARM OFF*** 03:38 5.60 SEC ***************************************** OUT OF REGULATION ERROR 03:39 70.87 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 3 54.37SECONDS ***ALARM ON*** 03:39 10.34 SEC **************************************** ERROR 03:39 IGNITE RF FAILURE ( 92 2 547 18 03:39) ( 1/ 4, 1/ 3, 1/ 2, 1/ 1, 0/ 0) (RECIPE #10011) **************************************** ***************************************** OUT OF REGULATION ERROR 03:44 321.12 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 3 54.37SECONDS ***************************************** ***ALARM ON*** 03:44 0.79 SEC ***ALARM OFF*** 03:44 1.98 SEC ***************************************** OUT OF REGULATION ERROR 03:53 523.52 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 4 51.87SECONDS ***************************************** ***ALARM ON*** 03:53 1.18 SEC ***ALARM OFF*** 03:53 4.30 SEC VALID USER ID ENTERED 03:53 27-Jan-99 #======= Disconnected 12:45 1999-01-27 Duration 23:08:33 Transfers 0 =========# **************************************** ERROR 13:03 HI VAC INTERLOCK LOST ( 77 2 830 9 13:03) ****************************************  RECIPE # 3190 27-Jan-99 13:19 COOL TIME 10.0 SEC. TFM SEQUENCE 33 OUTPUT CODE 528 + DEVIATION 100 PERCENT - DEVIATION 100 PERCENT TFM STANDARD 8 m ohm/sq. STATION 1 STATION 2 RF ETCH YES HEAT/COOL (H/C) YES SETTLING TIME 5.0 DEPOSIT 1 YES ETCH TIME 73.0 DEPOSIT 2 NO SELF BIAS VOLTAGE 50% PRE- H/C TIME 60.0 ON RAMP TIME 30.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 5.0 DEPOSIT 1 POWER 12% DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% ON RAMP TIME 5.0 SHUTTER DELAY TIME 65.0 SHUTTER OPEN TIME 0.0 STATION 3 STATION 4 HEAT/COOL (H/C) YES HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 60.0 PRE- H/C TIME 60.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0 ***************************************** OUT OF REGULATION ERROR 13:24 199.69 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 1 62.92SECONDS ***************************************** ***ALARM ON*** 13:24 1.36 SEC ***ALARM OFF*** 13:24 9.05 SEC ***************************************** OUT OF REGULATION ERROR 13:26 75.77 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 1 62.92SECONDS ***************************************** OUT OF REGULATION ERROR 13:27 99.19 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 1 12.45SECONDS ***************************************** ***ALARM ON*** 13:27 0.85 SEC ***ALARM OFF*** 13:27 4.58 SEC ***************************************** OUT OF REGULATION ERROR 13:29 76.62 SEC STATION WAFER TIME OUT OF REGULATION 1 1/ 1 12.45SECONDS ***SHUT DOWN COMPLETE*** 13:45 921.13 SEC ***IN STANDBY STATE*** 13:45 0.30 SEC VALID USER ID ENTERED 13:45 27-Jan-99 **************************************** ERROR 13:47 HI VAC INTERLOCK LOST ( 77 2 830 9 13:47) ****************************************  RECIPE # 3180 28-Jan-99 08:28 COOL TIME 10.0 SEC. TFM SEQUENCE 33 OUTPUT CODE 528 + DEVIATION 100 PERCENT - DEVIATION 100 PERCENT TFM STANDARD 8 m ohm/sq. STATION 1 STATION 2 HEAT/COOL (H/C) NO HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 0.0 PRE- H/C TIME 10.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0 STATION 3 STATION 4 HEAT/COOL (H/C) YES HEAT/COOL (H/C) YES DEPOSIT 1 NO DEPOSIT 1 NO DEPOSIT 2 NO DEPOSIT 2 NO PRE- H/C TIME 10.0 PRE- H/C TIME 10.0 POST- H/C TIME 0.0 POST- H/C TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 TIME 0.0 DEPOSIT 1 POWER 0% DEPOSIT 1 POWER 0% DEPOSIT 2 TIME 0.0 DEPOSIT 2 TIME 0.0 DEPOSIT 2 POWER 0% DEPOSIT 2 POWER 0% ON RAMP TIME 0.0 ON RAMP TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER DELAY TIME 0.0 SHUTTER OPEN TIME 0.0 SHUTTER OPEN TIME 0.0 ***SHUT DOWN COMPLETE*** 08:46 995.11 SEC ***IN STANDBY STATE*** 08:46 0.28 SEC **************************************** ERROR 09:43 HI VAC INTERLOCK LOST ( 77 2 830 9 09:43) **************************************** VALID USER ID ENTERED 13:21 28-Jan-99 **************************************** ERROR 16:20 FRONT COVER NOT CLOSED ( 123 1 843 9 16:20) ****************************************